The 3kW Research Capacity series provides enhanced beam stability and efficient XY sweep with full crucible coverage.

Plug-in emitter assemblies and sweep coil assemblies make the sources easier to service. The line includes a full spectrum of power supplies, sweep controllers and accessories, including crucible liners.

Specifications:

• Operating pressure: Below 5 x 10-5 Torr is desirable for best operation
• Beam voltage : 4 kVDC
• Beam current : 0-750 mA continuously variable
• Maximum power : 3 kW
• Cooling water : 5.7 l/min
• Pressure differential: 25 psi minimum
• Maximum bakeout temperature:  230°C
• Crucible volume:  2.24 cc or 4 cc

Various mounting options of the sources are available. Please consult us.