_1673427121.png)
Ceramic heaters
Download PDF documentationInformation guide
PBN PG ceramic heaters :
The heating elements are made from a Pyrolytic Graphite (PG) electrical conductor, covered with a refractory insulator, Pyrolytic Boron Nitride (PBN).
Advantages
- UHV compatible
- very good temperature homogeneity
- operating temperature: 1500°C and higher
- mechanically durable
- termally shock resistant
- power density: > 35 W/cm2
- chemically inert to most corrosive gases
Applications
- PVD and PECVD
- Ion implantation
- CVD and MOCVD
- PLD (laser ablation)
Specific dimensions on request.
Thin films
Disc heaters PBN/PG
Thin films
Disc heaters PBN/PG with tabs
Thin films