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Sputtering targets
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Neyco provides several types of targets for sputtering:
- Pure or alloyed metal targets (binary/ternary/quaternary/+), from 99% to 99.999%.
- Hot pressed oxides and intermetallic targets without binder: Al2O3, AZO, ITO, PZT, SiO2, ZnO...
- Industrial application targets: Al, Ni/Cr, Mo, Ta, Ti/Al, W …
Most sputtering targets can be fabricated into a wide range of shapes and sizes such as : circular, rectangular, Delta, ring, tube and more on request.
There are some technical limitations to the maximum size for a given single piece construction. In such cases, a multi-segmented target can be produced with the individual segments joined together by butt or beveled joints.
All targets are delivered with a certificate of analysis.
The materials are checked before shipping with a X-fluorescence analyzer. Certificate on request.
Materials
Aluminum based targets , Al
Materials
Antimony based targets, Sb
Materials
Silver based targets, Ag
Materials
Barium based targets, Ba
Materials
Bismuth based targets, Bi
Materials
Boron based targets, B
Materials
Cadmium based targets, Cd
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Calcium based targets, Ca
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Graphite based targets, C
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Cerium based targets, Ce
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Cesium based targets, Cs
Materials
Chromium based targets, Cr
Materials
Cobalt based targets, Co
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Copper based targets, Cu
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Dysprosium based targets, Dy
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Erbium based targets, Er
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Tin based targets, Sn
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Europium based targets, Eu
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Iron based targets, Fe
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Gadolinium based targets, Gd
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Gallium based targets, Ga
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Germanium based targets, Ge
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Hafnium based targets, Hf
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Holmium based targets, Ho
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Indium based targets, In
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Iridium based targets, Ir
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Potassium based targets, K
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Lanthanum based targets, La
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Lithium based targets, Li
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Magnesium based targets, Mg
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Manganese based targets, Mn
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Molybdenum based targets, Mo
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Neodymium based targets, Nd
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Nickel based targets, Ni
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Niobium based targets, Nb
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Gold based targets, Au
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Palladium based targets, Pd
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Osmium based targets, Os
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Platinum based targets, Pt
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Lead based targets, Pb
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Praséodymium based targets, Pr
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Rhenium based targets, Re
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Rhodium based targets, Rh
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Ruthenium based targets, Ru
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Samarium based targets, Sm
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Scandium based targets, Sc
Materials
Selenium based targets, Se
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Silicon based targets, Si
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Sodium based targets, Na
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Strontium based targets, Sr
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Tantalum based targets, Ta
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Tellurium based targets, Te
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Terbium based targets, Tb
Materials
Thulium based targets, Tm
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Titanium based targets, Ti
Materials
Tungsten based targets, W
Materials
Vanadium based targets, V
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Ytterbium based targets, Yb
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Yttrium based targets, Y
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Zinc based targets, Zn
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