RCR series, Multi-Pocket Rotary electron beam evaporation sources

The  Research Capacity series, 3 kW multiple-crucible rotary e-guns, provides enhanced beam stability and efficient XY sweep with full crucible coverage with automatic positioning available with the auto-indexer, sold separately.

General features :

• True XY sweep with full crucible coverage
• Sweep coils included with source
• Enhanced beam collimation
• Plug-in emitter module
• Enhanced high-stability cooling
• Cross-contamination shielding
• Rugged design
• Optional auto-indexer

 

Specifications :

Operating Pressure Below 5 x 10-5 Torr is desirable for best operation Emission Voltage 4,000 V Emission Current 0–750 mA continuously variable Maximum Power 3 kW Cooling Water 5.7 lpm Maximum Bakeout Temperature 120°C Crucible Volume 2.24 cc x 4, 6, or 8 crucibles

The operating principle of the multiple crucible e-Gun is identical to the single crucible source with the following advantages:

• Large supply of evaporant—When every crucible is filled with the same source material, an increased volume of evaporant can be evaporated in a single vacuum cycle.
• Deposition of up to eight different materials in one vacuum cycle—A different material can be put in each crucible and deposited in any sequence during a single vacuum cycle. The deposition rates are the same as those of the single crucible model. Only one crucible is heated at a time. The single filament remains stationary and the crucible head is indexed into position by the drive handle. Therefore, the evaporation always originates from exactly the same position in the vacuum chamber. The inactive crucibles are shielded from the heated crucibles by the magnetic pole pieces, thereby eliminating contamination between crucibles.

For further détails, please call or e-mail us.