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Vacuum

Purge gas valve

Description

The purge gas valve is used for fast regeneration of cryopumps. It is an alternative to regeneration with the heating cartridge. The pressure increase in the pump improves heat convection, and the internal components heat up faster. The released gases are continuously or alternately pumped out by the forevacuum pump.

Features

  • Power supply 24 VDC (8W), all common voltages available upon request
  • Vacuum-side connection ISO-KF DN 16
  • Gas connection compression fitting 1/4″
  • Gas connection max. 8 bar
  • Seal FKM
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Description

The purge gas valve is used for fast regeneration of cryopumps. It is an alternative to regeneration with the heating cartridge. The pressure increase in the pump improves heat convection, and the internal components heat up faster. The released gases are continuously or alternately pumped out by the forevacuum pump.

Features

  • Power supply 24 VDC (8W), all common voltages available upon request
  • Vacuum-side connection ISO-KF DN 16
  • Gas connection compression fitting 1/4″
  • Gas connection max. 8 bar
  • Seal FKM

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Fast delivery
in France and Europe

ISO 9001
and 14001 certifications

Service / Maintenance of
mechanical components