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Accessories for cryogenic pumps

Information guide

HSR cryopumps can be individually equipped with a wide variety of accessories. An important factor is the regeneration time, i.e., the duration for thawing the pump to ambient temperature. We distinguish four main versions: Basic without regeneration accessories, Classic, Standard, and Performance. 

Contact us for a comparison of the different versions with respect to regeneration time.

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Vacuum

Cold head heating (Performance)

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Heating cartridge (Standard)

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Housing heating (Classic)

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Purge gas valve

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Cryo temperature monitor

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Cryo temperature sensors

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Service adapter set

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Flexlines