Cryogenic pumps

Cryopumps are gas-binding systems that create a hydrocarbon-free vacuum in the range of 10-2 mbar to 10-11 mbar. They are designed to pump the entire spectrum of gases. In addition to the standard solution, we offer various series and configurations that are optimized for specific processes.

HSR AG cryopumps are known for their excellent performance and reliability in operation. Long operating times between required regenerations and short regeneration times ensure smooth operation at an economical cost.

HSR pumps are used in a variety of application areas, including:

• PVD thin-film coating systems (sputter and metal evaporation processes
• Vacuum chambers for space simulation
• Test reactors for nuclear fusion
• Particle accelerators in basic research
• Particle accelerators for the production of isotopes for nuclear medicine

For projects with special requirements (working with radiation, magnetic fields, or operation in ultra-high vacuum), please contact our sales team directly.