Diffusion pumps

HSR AG has optimized and perfected the tried and tested technology of diffusion pumps.

Energy-saving ECO versions expand the range of diffusion pumps, becoming increasingly popular in the face of the continuing energy crisis. Our customers benefit from the durability of these robust, low-maintenance pumps, the availability of original Balzers AG spare parts and maximum process stability in operation.

Diffusion pumps are suitable for many applications using high-vacuum technology, where small amounts of oil residue in the vacuum chamber are acceptable. Examples of applications include evaporation deposition systems, vacuum furnaces (vacuum quenching, vacuum brazing, etc.), vacuum applications in intense magnetic fields (e.g. particle gas pedals), vacuum distillation of essential oils and coating of packaging films.

Key features:

• Available in sizes DN40 to DN1000
• Robust design without sensitive electronics
• High pumping capacity
• Good primary vacuum resistance
• Low oil back-diffusion
• Low height
• Proven heating system from Balzers AG, with highly durable heating plates and no oil deposits due to hot spots inside the pump
• Simple system without heating power control
• Temperature switch or PT100 with protective tube
• Temperature protection switch for protection against overheating