"ECO" diffusion pumps

The energy-efficient ECO versions are available in sizes DN 320 to DN 1000 and offer energy cost savings of up to 45%. The heat radiation to the surrounding air is 5% of the rated power. In conventional standard diffusion pumps, the proportion is 25%.

HSR ECO diffusion pumps have been tested both in our laboratory and under practical conditions with the propellants 66A, HSR704EU, and HSR705. It has been verified that the extraordinary performance data of HSR diffusion pumps is maintained.

To achieve the maximum energy savings of 45%, the ECO pumps feature a standby function. When activated, specific heating plates at the pump’s base are turned off. This mode is primarily suitable for overnight operation with the high vacuum valve closed. Under special circumstances and with a stable process pressure below 10^-4 mbar, the ECO pump in standby mode can also be operated at partial load. Our throttling angle valves are particularly well-suited for this purpose (see HVT angle valves).

For the entire size range from DN 320 to DN 1000, we also provide retrofit kits for installation at the customer’s site. All diffusion pumps of the corresponding sizes and types from BALZERS, PFEIFFER, and HSR (e.g., DIF500, DIF500A, PDA501-W, etc.) can be retrofitted on-site.