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CDG025D to 200D
Information guide
SKY series, temperature compensated
Pressure measurement over 4 decades
From 0.1 Torr full scale (F.S.) for CDG025D to CDG100D
From 1 Torr full scale (F.S.) for CDG160D and CDG200D
Applications :
- Semiconductor industry: Etching, CVD, PVD, ALD
- Thin film processes requiring high precision pressure measurement
- Vacuum process in corrosive environment
