CDG045Dhs CDG100Dhs

Information guide

StripeTM Series

4-decade pressure measurement

From 0.1 Torr full scale (F.S.) for the CDG100Dhs 

Fast: response time < 2 ms

 

Applications :

  • Semiconductor industry: Etching, CVD, PVD
  • Atomic layer deposition
  • General applications requiring vacuum at high temperature
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Vacuum

Capacitive gauge CDG045Dhs

Vacuum

Capacitive gauge CDG100Dhs