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Flanges & Connectors
Information guide
- inspectable flanges for process control, plasma and overn
- insertion of (UV) laser ligth into reaction tube (quartz flange)
- UV protection with Duran flanges/windows
- quartz for lowest UV absorption
- vacuum down to 10-9 mbar
- temperature range of quartz to 1000°C/ Duran up to 450°C
- pressure up to 2 bar (DN10...DN50) / 1.5 bar (DN63)
- antimagnetic and radiation resistant
- excellent chemistry/corrosion
- cleanroom suitable and electrical isolation
- for ultra-pure processes as ion implanters, ...
