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Thin films
HCR Series Multiple Crucible Rotary e-Guns
Description
The HCR series rotary e-Gun is an all metal-sealed e-Gun available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.
General features:- 3 to 8 crucibles available
- 270° beam deflection
- Multiple crucibles, rotary design
- Interchangeable crucible assemblies
- Long life emitter assembly
- Easy filament replacement
- Permanent magnet beam positioning
- Integral sweep coils
- Available with bottom or side drive
Specifications :
Operating Pressure Below 5 x 10-5 Torr is desirable for best operation Emission Voltage -6 to -10 V Emission Current 0–1 A Maximum Power 10 kW Cooling Water 11.4 lpm Maximum Bakeout Temperature 120°C Crucible Volume 7, 15, 25 or 40 cc
Please call or e-mail us for further information.
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Description
The HCR series rotary e-Gun is an all metal-sealed e-Gun available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.
General features:
- 3 to 8 crucibles available
- 270° beam deflection
- Multiple crucibles, rotary design
- Interchangeable crucible assemblies
- Long life emitter assembly
- Easy filament replacement
- Permanent magnet beam positioning
- Integral sweep coils
- Available with bottom or side drive
Specifications :
| Operating Pressure | Below 5 x 10-5 Torr is desirable for best operation |
| Emission Voltage | -6 to -10 V |
| Emission Current | 0–1 A |
| Maximum Power | 10 kW |
| Cooling Water | 11.4 lpm |
| Maximum Bakeout Temperature | 120°C |
| Crucible Volume | 7, 15, 25 or 40 cc |
Please call or e-mail us for further information.
Downloads
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Fast delivery
in France and Europe
ISO 9001
and 14001 certifications
Service / Maintenance of
mechanical components