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Thin films
RC Series, Research capacity electron beam evaporation sources
Description
The 3kW Research Capacity series provides enhanced beam stability and efficient XY sweep with full crucible coverage.
Plug-in emitter assemblies and sweep coil assemblies make the sources easier to service. The line includes a full spectrum of power supplies, sweep controllers and accessories, including crucible liners.
Specifications:
- Operating pressure: Below 5 x 10-5 Torr is desirable for best operation
- Beam voltage : 4 kVDC
- Beam current : 0-750 mA continuously variable
- Maximum power : 3 kW
- Cooling water : 5.7 l/min
- Pressure differential: 25 psi minimum
- Maximum bakeout temperature: 230°C
- Crucible volume: 2.24 cc or 4 cc
Various mounting options of the sources are available. Please consult us.
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- Description
- Downloads
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Description
The 3kW Research Capacity series provides enhanced beam stability and efficient XY sweep with full crucible coverage.
Plug-in emitter assemblies and sweep coil assemblies make the sources easier to service. The line includes a full spectrum of power supplies, sweep controllers and accessories, including crucible liners.
Specifications:
- Operating pressure: Below 5 x 10-5 Torr is desirable for best operation
- Beam voltage : 4 kVDC
- Beam current : 0-750 mA continuously variable
- Maximum power : 3 kW
- Cooling water : 5.7 l/min
- Pressure differential: 25 psi minimum
- Maximum bakeout temperature: 230°C
- Crucible volume: 2.24 cc or 4 cc
Various mounting options of the sources are available. Please consult us.
Downloads
Schemes
RCF_e-GUN_plan2D.pdfIf you want an offer, or more information on this product, contact us:
Fast delivery
in France and Europe
ISO 9001
and 14001 certifications
Service / Maintenance of
mechanical components